JPS6223855U - - Google Patents
Info
- Publication number
- JPS6223855U JPS6223855U JP11519185U JP11519185U JPS6223855U JP S6223855 U JPS6223855 U JP S6223855U JP 11519185 U JP11519185 U JP 11519185U JP 11519185 U JP11519185 U JP 11519185U JP S6223855 U JPS6223855 U JP S6223855U
- Authority
- JP
- Japan
- Prior art keywords
- coil
- reduced pressure
- heating
- vapor deposition
- chemical vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005229 chemical vapour deposition Methods 0.000 claims description 2
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
- General Induction Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11519185U JPH0213484Y2 (en]) | 1985-07-29 | 1985-07-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11519185U JPH0213484Y2 (en]) | 1985-07-29 | 1985-07-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6223855U true JPS6223855U (en]) | 1987-02-13 |
| JPH0213484Y2 JPH0213484Y2 (en]) | 1990-04-13 |
Family
ID=30998609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11519185U Expired JPH0213484Y2 (en]) | 1985-07-29 | 1985-07-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0213484Y2 (en]) |
-
1985
- 1985-07-29 JP JP11519185U patent/JPH0213484Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0213484Y2 (en]) | 1990-04-13 |